We have a variety of carriers (cassettes) in each size for 50mm – 300mm semiconductor wafer process. Wafer carrier has its own feature and can be selected according to customer’s application respectively.
Wafer carrier could meet customer’s production machines and it could avoid direct contact with the wafers by hands, which may cause contamination of the wafers or products damage.
Reticle SMIF Pods
To secure customers advanced reticle handing with safe storage and protection environment when producing and processing 6 inch masks.
- Low outgas & low inorganic ion
- ESD safe
- Visibility of Reticle
- Particle performance
Cassette Material Introduction :
- General Transportation : PP, PBT Cassette
- Wet and Cleaning Process : PFA Cassette
- High Temperature : PFA, PEI, PEEK, Alumina Cassette
Reticle SMIF Pods Material Introduction :
- PC Blended Carbon