Integrative
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Quality
Advanced
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Execution

Cassette & Reticle SMIF Pods

Introduction

It is the carrier for transportation and protection products in the Fab.

The main function is used for the transportation and storage of silicon wafer and reticle during the processes.

Application :

  • 50mm~300mm silicon wafer process
  • 6 inch mask manufacturing process

Description

Cassette 

We have a variety of carriers (cassettes) in each size for 50mm – 300mm semiconductor wafer process. Wafer carrier has its own feature and can be selected according to customer’s application respectively.

Wafer carrier could meet customer’s production machines and it could avoid direct contact with the wafers by hands, which may cause contamination of the wafers or products damage.

Reticle SMIF Pods

To secure customers advanced reticle handing with safe storage and protection environment when producing and processing 6 inch masks.

  • Low outgas & low inorganic ion
  • ESD safe
  • Visibility of Reticle
  • Particle performance

Spec :

Cassette Material Introduction  :

  • General Transportation : PP, PBT Cassette
  • Wet and Cleaning Process : PFA Cassette
  • High Temperature : PFA, PEI, PEEK, Alumina Cassette

Reticle SMIF Pods Material Introduction :

  • PC Blended Carbon

Product Contact

Hsin-Yu Su

Sales Dept. I, Engineering Integration Div., 5th Business Unit
Sales Manager

TOPCO SCIENTIFIC CO.,LTD.

6F., No. 12, Industry E. 9th Rd., Science based Industrial park, Hsinchu City 300096, Taiwan
TEL: (03)564-2132 ext.3363
e-mail: hsinyu.su@topco-global.com

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