Description
Details:
Fujimi oxide, poly, W, Cu slurry for CMP process.
Use:
Oxide Slurry:PL-4101(STI),PL-4217系列(IMD)
Poly Slurry:PL-6103
W Slurry:PL-5201/PL-5107
Cu Slurry:PL-7102/PL-7104
Spec:
Drum Type: 220Kg
Bottle Type: 20Kg
Silica Base
Warranty: 1 year life time
Temperature: 0~43 Degree C.