Description
Use：
Hugle UPC-12100 is an automatic 300mm FOUP cleaning system using D.I water ultrasonic oscillating nozzles and an automatic transport system SECS II protocol that supports 0HT/RGV. This is a new development in the Hugle electronic cleaning system with rich experience and technology.
- Substrate for epitaxy process.
- Substrate for high brightness LED wafer
Spec：
- 2″wafer
- Spec.-customize
