◆ Just use the DIW no need to add detergent,high pressure and low flow can achieve ultra-high cleaning performance, which can greatly improve the yield of semiconductor/panel high-end manufacturing processes.
◆ The pump is designed for water self-lubrication, no additional or regular replacement of lubricating oil is required, which can completely avoid the risk of contamination.
◆ Simple construction of system components, small pump size, high mute efficiency, and quick maintenance.
◆ Long life time, few replacement parts, and low overhaul cost.
Pump pressure : 2 Mpa～15 Mpa
Filter specifications : source low-pressure side：1.2μm, high-pressure side：1.0μm
Equipment reference size (L 1355mm *W 705mm *H 1570mm)
Also adjust and order according to customer needs.