- ■ AMHS capability:
- Robust design featuring in automated material handling system operating 8kg payload with overhead transport(OHT), automated-guided vehicle(AGV), person-guided vehicle(PGV).
- and forklift conveyors, loadports, storage or stocker shelves and workstations properly working with.
Capacity: 25 wafers
SEMI Std: Compliant(E47.1, E1.9, E15.1, E57, E62 and S8)
Options: Conductive side rails, Bar code & RF ID Tag holder, UV cut window & Card Case.