- Horizontal Tube Cleaner : 5~20% of HF in acid tank in accordance with the requirements. The inner/outer tube, container are cleaned by soaking in HF, and fully rinsed with DI water to dry.
- Vertical Tube Cleaner : The rotating mechanism is designed to wash the quartz tube repeatedly, no dead angle while cleaning is guaranteed.
- Reducing the cost of regular send out cleaning fees.
- Cleanroom contamination risk is lowered to be in accordance with advanced process requirements.
- Cleaning process can be set up for different products, and the flow of process control is stable.
- Cleaning records retention.
Customized production according to customer needs.