特殊氣體

諮詢產品專家

內容簡介

代理科慕-C4F8 Clean gas，在T/F CVD Chamber clean。

描述
產品聯絡人

描述

用途：

取代C2F6, C3F8之應用；並可降低PFC排放量及氣體減量。

規格：

For In-Situ tool(6″ and 8″) chamber clean

產品聯絡人

吳逸民

高材營一部
資深經理

崇越科技股份有限公司

30075 新竹市科學園區工業東九路12號4樓&6樓
TEL:(03)564-2132 ext.3315
e-mail:dino.wu@topco-global.com

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特殊氣體

內容簡介

描述

用途：

規格：

產品聯絡人

吳逸民

高材營一部資深經理

崇越科技股份有限公司

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