描述
用途:
- 无尘室内承载12吋Wafer的容器;
- 无尘室内保护12吋产品,防尘所需容器;
- 搭配自动化系统,传送Wafer到生产设备端所需之容器。
规格:
Capacity: 25 wafers
Dimension: W426mm*L347mm*H338mm
Weight: 4.6kg
SEMI Std: Compliant(E47.1, E1.9, E15.1, E57, E62 and S8)
Options: Conductive side rails, Bar code & RF ID Tag holder, UV cut window & Card Case.