Hatata CO2 automatic fire extinguishing system CABINEX-EWT
Hatata CO2 automatic fire extinguishing system CABINEX-EWT

Hatata CO2 automatic fire extinguishing system CABINEX-EWT

HATSUTA’s CO2 fire fighting system provides pure and clean gas for fire extinguishing inside the machine, which can perform fire extinguishing function within 1 minute. Besides, after discharging, the automatic fire extinguishing system can recover protected equipment back to normal operating condition with lowest cost and in short time.

Production Intro

Application：

Process Process Equipment
Reticle Photo mask
  • Reticle cleaning equipment
Developing etching process
  • Etcher
  • Coater
  • Coating and stripping equipment
  • Vapor drying equipment
Wafer polishing process
  • Cleaning equipment using flammable solvents
Photo resist coating process
  • Sping coating equipment
  • IPA cleaning
  • Vapor drying equipment
Oxide diffusion CVD ion implanting
  • Cleaning equipment using flammable solvents
Others
  • Other equipment using flammable solvents

Cabinex-EWT is automatic fire extinguishing system(CO2) for Semiconductor and F.P.D Manufacturing Equipment.

  1. FM Approved.
  2. Compact and Slim.
  3. EWT control panel could check the below information：
    • 100 history record. (abnormality, fault situation, alarm)
    • Addressable points function.
    • Remote monitor function.
  4. Clean efficient CO2 system：It is non-conductive and clean. After discharging CO2, there is little effect on the clean room environment and the protected equipment.
  5. No chemical reaction and no mechanical pollution.
  6. It is designed to protect industrial business equipment and machines for 24 hours.
  7. Long life time and the system material(CO2) could resistant acid and Alkali attack.
  8. Sensors with high reliability：multiple automatic detections can reduce errors from human operation.
  9. High cost performance：After discharge, the automatic fire extinguishing system could save time and cost to recover equipment.
CO2 Specification Models Dimensions Weight Fire extinguishing agent Weight of fire extinguishing agent
Integrated Type COX-50EWT 1,530*500*370 170kg CO2 22.7kg
(50LB)
COX-100EWT 1,980*550*400 270kg CO2 45.4kg
(100LB)
COX-100EWT-W 1980*850*400 400kg CO2 45.4kg
(100LB)*2
Seperate type control unit COX-50EWT-S 1530*500*370 155kg CO2 22.7kg
(50LB)
COX-100EWT-S 1980*550*400 255kg CO2 45.4kg
(100LB)
COX-100EWT-WS 1980*850*400 385kg CO2 45.4kg
(100LB)*2

Product Contact

Charlies Chang

  • TOPCO SCIENTIFIC CO.,LTD.
  • Project Manager
  • Sales Dept. I, Engineering Integration Div., 5th Business Unit
6F., No. 12, Industry E. 9th Rd., Science based Industrial park, Hsinchu City 300096, Taiwan
TEL: (03)564-2132 ext.3313
charlies.chang@topco-global.com