CABINEX-EN2
CABINEX-EN2
CABINEX-EN2
CABINEX-EN2
CABINEX-EN2
CABINEX-EN2

CABINEX-EN2

CABIN EX-EN2 is an automatic CO2 fire extinguishing system that does not react chemically with the protected hazards nor leaves any residue thereon. Cabinex-EN2 provides effectiveness and safety.

Production Intro

Application：

Process Process Equipment
Reticle Photo mask • Reticle cleaning equipment
Developing etching process
  • Etcher
  • Coater
  • Coating and stripping equipment
  • Vapor drying equipment
Wafer polishing process
  • Cleaning equipment using flammable solvents
Photo resist coating process
  • Sping coating equipment
  • IPA cleaning
  • Vapor drying equipment
Oxide diffusion CVD ion implanting
  • Cleaning equipment using flammable solvents
Others
  • Other equipment using flammable solvents
Machining tools
  • Machining center, CNC lathe, Grinding machine.

The advantage of Cabinex-EN2

  1. Cabinex-EN2 provides effectiveness and safety for semiconductor equipment and machine tools.
  2. No chemical reaction and no mechanical pollution.
  3. It is designed to protect industrial business equipment and machines for 24 hours.
  4. Long life time and the system material(CO2) could resistant acid and Alkali attack.
  5. Sensors with high reliability：multiple automatic detections can reduce errors from human operation.

Spec

CO2 Specification Models Dimensions (mm) Weight Fire extinguishing agent Weight of fire extinguishing agent
Integrated Type COX-3EN2 760*290*180 23kg CO2 3.2kg
COX-5EN2 1160*4000*300 35kg CO2 4.6kg
COX-7EN2 920*320*215 37kg CO2 6.8kg
COX-14EN2 1160*4000*300 86kg CO2 14.0kg
COX-18EN2 1160*4000*300 90kg CO2 18.0kg

 

CO2 Specification Models Dimensions (mm) Weight Fire extinguishing agent Weight of fire extinguishing agent
Seperate type control unit

CPX-REN2
(Exposed/standalone control panel)

 345*280*90 6kg CO2 n/a
CPX-UEN2
(Embeded/standalone control panel)		 220*340*130 6.3kg CO2 n/a
COX-30ENA2 1755*400*330 140kg CO2 30kg
COX-45ENA2 1915*525*380 180kg CO2 45kg

 

CO2 Specification Models Dimensions (mm) Weight Fire extinguishing agent Weight of fire extinguishing agent
Seperate type control unit COX-3ENS2 760*290*180 23kg CO2 3.2kg
COX-5ENS2 920*320*215 34kg CO2 4.6kg
COX-7ENS2 920*320*215 84kg CO2 6.8kg
COX-14ENS2 1160*4000*300 86kg CO2 14.0kg
COX-18ENS2 1160*4000*300 88kg CO2 18.0kg
COX-30ENA2-S 1755*400*330 140kg CO2 30kg
COX-45ENA2-S 1915*525*380 180kg CO2 45kg

 

Product Contact

Charlies Chang

  • TOPCO SCIENTIFIC CO.,LTD.
  • Project Manager
  • Sales Dept. I, Engineering Integration Div., 5th Business Unit
6F., No. 12, Industry E. 9th Rd., Science based Industrial park, Hsinchu City 300096, Taiwan
TEL: (03)564-2132 ext.3313
charlies.chang@topco-global.com