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特殊气体

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1.25% Kr/Ne
1.25% Kr/Ne
1% SiH4(6N)/H2(6N)
1% SiH4(6N)/H2(6N)
10ppm Xenon/3.5% Argon/Balance Neon
10ppm Xenon/3.5% Argon/Balance Neon
C4F8
C4F8
DCS
DCS
N2O
N2O
NF3
NF3